Electrical and Structural properties of Copper Oxide (CuO) thin films on Plastic substrate deposited by spray pyrolysis technique

Mohammad G. Faraj, Askander K. Kaka, Halo D. Omar


In this paper, copper oxide (CuO) thin films were deposited on polyimide (PI) Plastic substrates with spray pyrolysis technique with different temperatures (i.e. 250–300 °C). All the deposited films were characterized by X-ray diffraction (XRD) and Hall Effect measurements for the Structural and electrical properties. Effects of substrate temperature on the structural and electrical characteristics of the films were studied. The X-ray diffraction patterns’ results reveal that the all of CuO films have a face centered cubic structure. The crystallite grain size was calculated using Scherrer formula and it is found that the substrate temperature (300 0C) has maximum crystallite grain size (81.2 nm). Hall Effect measurements showed that all the films are of p-type conductivity. Depending on the substrate temperature, Hall measurement showed that the electrical resistivity and the carrier concentration varied in the range 77.4 Ω.cm to 52.7 Ω.cm and  6.3 x1015 cm-3 to  10.1 x1015 cm-3.


Copper oxide, Chemical Spray Pyrolysis, Thin Film, Polyimide

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DOI: http://dx.doi.org/10.14500/aro.10558
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